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Levitation Micro-Systems

Applications to Sensors and Actuators

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eBook. PDF

eBook

2020

174 S. IX, 174 p. 93 illus., 91 illus. in color..

In englischer Sprache

Springer International Publishing. ISBN 978-3-030-58908-0

Das Werk ist Teil der Reihe: Microsystems and Nanosystems

Produktbeschreibung

This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and -actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and -accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.