Levitation Micro-Systems
Applications to Sensors and Actuators
Springer International Publishing
ISBN 978-3-030-58908-0
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eBook. PDF
2020
IX, 174 p. 93 illus., 91 illus. in color..
In englischer Sprache
Umfang: 174 S.
Verlag: Springer International Publishing
ISBN: 978-3-030-58908-0
Weiterführende bibliografische Daten
Das Werk ist Teil der Reihe: Microsystems and Nanosystems
Produktbeschreibung
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and -actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and -accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
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