Silicon Anodization as a Structuring Technique

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

• Silicon Anodization: State of the Art
• Experimental, Characterization and Simulation Methods
• Microscale Study of Anodization Process
• Anodization Process as a Structuring Technique: Experiments and Simulation

• Researchers and students of microsystems technology, electrochemistry, microengineering
• Practitioners in the area of microsystems, silicon processing and electrochemical material processing

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