BÜCHER VERSANDKOSTENFREI INNERHALB DEUTSCHLANDS
eBook
Metal Impurities in Silicon- and Germanium-Based Technologies
Origin, Characterization, Control, and Device Impact
Springer International Publishing
ISBN 978-3-319-93925-4
Standardpreis
Bibliografische Daten
eBook. PDF
2018
XXXIII, 438 p. 215 illus., 207 illus. in color..
In englischer Sprache
Umfang: 438 S.
Verlag: Springer International Publishing
ISBN: 978-3-319-93925-4
Weiterführende bibliografische Daten
Das Werk ist Teil der Reihe: Springer Series in Materials Science
Produktbeschreibung
This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on the electrical device performance. Several control and possible gettering approaches are addressed.
The book is a reference for researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. It has an interdisciplinary nature by combining different disciplines such as material science, defect engineering, device processing, defect and device characterization and device physics and engineering.
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