New Prospects of Integrating Low Substrate Temperatures with Scaling-Sustained Device Architectural Innovation
Springer International Publishing
ISBN 978-3-031-02027-8
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Bibliografische Daten
eBook. PDF
2022
VIII, 72 p..
In englischer Sprache
Umfang: 72 S.
Verlag: Springer International Publishing
ISBN: 978-3-031-02027-8
Weiterführende bibliografische Daten
Das Werk ist Teil der Reihe: Synthesis Lectures on Emerging Engineering Technologies
Produktbeschreibung
In order to sustain Moore's Law-based device scaling, principal attention has focused on toward device architectural innovations for improved device performance as per ITRS projections for technology nodes up to 10 nm. Efficient integration of lower substrate temperatures (
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