Erschienen: 18.07.2019 Abbildung von Pelleg | Mechanical Properties of Silicon Based Compounds: Silicides | 1st ed. 2019 | 2020
eBook

Pelleg

Mechanical Properties of Silicon Based Compounds: Silicides

1st ed. 2019 2020. eBook , eBook. PDF

Springer-Verlag GmbH. ISBN 978-3-030-22598-8

In englischer Sprache

Das Werk ist Teil der Reihe: Engineering Materials

Produktbeschreibung

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.

Autoren

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