Erschienen: 17.03.2009 Abbildung von Mertens / Meuris | Ultra Clean Processing of Semiconductor Surfaces IX | 1. Auflage | 2009 |

Mertens / Meuris / Heyns

Ultra Clean Processing of Semiconductor Surfaces IX

lieferbar, ca. 10 Tage

Buch. Softcover


412 S

In englischer Sprache

Trans Tech Publications. ISBN 978-3-908451-64-8

Format (B x L): 17 x 24 cm

Gewicht: 900 g


Volume is indexed by Thomson Reuters CPCI-S (WoS).
The contents of this publication include every conceivable issue related to contamination, cleaning and surface preparation during mainstream large-scale integrated circuit manufacture. Typically, silicon is used as the main semiconductor substrate. However, other semiconducting materials such as SiGe and SiC are currently being used in the source-sink junction areas, and materials such as Ge and III-V compounds are being considered for the transistor channel region of future-generation devices.

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