Erschienen: 03.10.2007 Abbildung von Lobontiu | Dynamics of Microelectromechanical Systems | 2007 | 17


Dynamics of Microelectromechanical Systems

2007. Buch. x, 403 S. Bibliographien. Hardcover

Springer. ISBN 978-0-387-36800-9

Format (B x L): 15,5 x 23,5 cm

Gewicht: 783 g

In englischer Sprache

Das Werk ist Teil der Reihe: Microsystems; 17


This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: - An in-depth treatment of problems that involve reliable modeling, analysis and design, - Analytical models with correct dependences on service dimensions, - Cantilever based systems for nanofabrication researchers and designers, and - Dynamics of complex spring and beam microsystems. Although not designed for a specific course, this material could be used as a text at the upper-undergraduate/graduate level, and, as such, it contains numerous fully-solved examples as well as many end-of-the-chapter proposed problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.


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