Erschienen: 22.09.2017 Abbildung von Ivanov | Silicon Anodization as a Structuring Technique | 1. Auflage | 2017 |


Silicon Anodization as a Structuring Technique

Literature Review, Modeling and Experiments

Buch. Softcover

1st ed. 2018. 2017

xxix, 316 S. 138 s/w-Abbildungen, 3 Farbabbildungen, 3 Farbtabellen, Bibliographien.

In englischer Sprache

Springer Vieweg. ISBN 978-3-658-19237-2

Format (B x L): 14,8 x 21 cm

Gewicht: 450 g


Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents - Silicon Anodization: State of the Art - Experimental, Characterization and Simulation Methods - Microscale Study of Anodization Process - Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups - Researchers and students of microsystems technology, electrochemistry, microengineering - Practitioners in the area of microsystems, silicon processing and electrochemical material processing <The Author Alexey Ivanov is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

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